Nitrogen Trifluoride NF3
CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Dot Class: 2.2
Grade Standard: Electron Grade, Industrial Grade
Nitrogen Trifluoride is used in the plasma etching of silicon wafers.
Nitrogen Trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD
Nitrogen Trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers.